INFICON, Inc.
Manufacturer of instruments and software for vacuum measurement, leak detection, gas analysis, thin-film deposition monitoring, and smart manufacturing. Offers factory analytics and scheduling software, handheld and production-scale leak testers, residual gas analyzers and mass-spectrometers, quartz-crystal microbalance deposition sensors and controllers, and vacuum gauges and controllers for semiconductor, battery, vacuum-coating, HVAC/R, display, and medical/pharma applications.
Industries
N/A
Products
Handheld leak and gas detectors (interchangeable sensors)
Portable detectors for field leak localization with modular sensor options for refrigerants, CO2, combustible gases and other tracers, with cloud-assisted modes and portable accessories.
Electrolyte leak testers for battery manufacturing (inline/high-throughput)
Inline-capable electrolyte leak detection systems optimized for minimal chamber volume, multiple-chamber cascading, pneumatic interfaces for pre-evacuation and system SPS integration; supports inline calibration and cycle times targeted below 15 seconds in optimized configurations.
Vacuum gauges and controllers (multi-technology)
Range of vacuum and pressure sensors (capacitance diaphragm, Pirani, hot/cold ionization) and controllers for process measurement, control and data recording with multiple digital and analog interfaces for harsh environments.
QCM-based deposition controllers and sensors
High-resolution controllers and quartz-crystal sensors for in-situ thickness and rate control in optical coating and vacuum deposition processes, with front-loading dual-crystal sensor heads.
Residual gas analyzers and process gas monitors
Mass-spectrometry and optical gas analysis instruments for gas composition analysis, contamination monitoring and process optimization in vacuum environments.
Handheld infrared methane detector (LDAR)
Rugged, intrinsically safe handheld instrument using infrared absorption for methane detection across a wide dynamic range, targeted at LDAR programs and field emission surveys.
Handheld leak and gas detectors (interchangeable sensors)
Portable detectors for field leak localization with modular sensor options for refrigerants, CO2, combustible gases and other tracers, with cloud-assisted modes and portable accessories.
Electrolyte leak testers for battery manufacturing (inline/high-throughput)
Inline-capable electrolyte leak detection systems optimized for minimal chamber volume, multiple-chamber cascading, pneumatic interfaces for pre-evacuation and system SPS integration; supports inline calibration and cycle times targeted below 15 seconds in optimized configurations.
Vacuum gauges and controllers (multi-technology)
Range of vacuum and pressure sensors (capacitance diaphragm, Pirani, hot/cold ionization) and controllers for process measurement, control and data recording with multiple digital and analog interfaces for harsh environments.
QCM-based deposition controllers and sensors
High-resolution controllers and quartz-crystal sensors for in-situ thickness and rate control in optical coating and vacuum deposition processes, with front-loading dual-crystal sensor heads.
Residual gas analyzers and process gas monitors
Mass-spectrometry and optical gas analysis instruments for gas composition analysis, contamination monitoring and process optimization in vacuum environments.
Handheld infrared methane detector (LDAR)
Rugged, intrinsically safe handheld instrument using infrared absorption for methane detection across a wide dynamic range, targeted at LDAR programs and field emission surveys.
Services
Smart manufacturing software and services (digital twin and FabGuard monitoring)
Deployment and integration of real-time digital twin, EPI-based monitoring, recipe execution tracking, dashboards, scheduling and analytics to optimize throughput, reduce variation and generate automated alerts and reports.
Instrument service plans and spare-parts support
Aftermarket service plans, spare parts supply and field-upgradeable options for controllers and sensors.
Permeability testing support using tracer-gas methods
Application support and measurement workflows for film and membrane permeability testing using tracer gas methods and leak-detection instruments for material quality control and characterization.
Smart manufacturing software and services (digital twin and FabGuard monitoring)
Deployment and integration of real-time digital twin, EPI-based monitoring, recipe execution tracking, dashboards, scheduling and analytics to optimize throughput, reduce variation and generate automated alerts and reports.
Instrument service plans and spare-parts support
Aftermarket service plans, spare parts supply and field-upgradeable options for controllers and sensors.
Permeability testing support using tracer-gas methods
Application support and measurement workflows for film and membrane permeability testing using tracer gas methods and leak-detection instruments for material quality control and characterization.
Expertise Areas
- Vacuum measurement and control for semiconductor processes
- Leak detection and high-throughput leak testing for batteries
- Thin-film deposition monitoring and in-situ QCM control
- Residual gas analysis and mass-spectrometry process monitoring
Key Technologies
- Quartz crystal microbalance (QCM) thickness and rate monitoring
- Quadrupole mass spectrometry and multi-pressure inlet RGA
- Capacitance diaphragm gauges with temperature compensation
- Optical gas spectroscopy for process monitoring