HTCC antenna for generation of microplasma
Inventors
Briglin, Shawn • Vollero, Michael • Wiley, John Gordon • WEDER, Mario
Assignees
Interested in licensing this patent?
MTEC can help explore whether this patent might be available for licensing for your application.
Publication Number
US-12198897-B2
Publication Date
2025-01-14
Expiration Date
Abstract
A plasma generation device for generating a plasma comprises a support having a first side and an opposing second side. The support is comprised of a ceramic matrix and a split-ring conductor is embedded in the ceramic matrix. A hermetically sealed via extends from the split-ring conductor to the second side of the support and connects to an electrical supply. A ground plane is formed on the second side of the support. A plasma is generated proximate to the first side of the support, and the support seals to a wall of the chamber such that the first side is exposed to the one or more gases inside the chamber and the second side is isolated from the plasma and the one or more gases inside of the chamber.
Core Innovation
A split-ring conductor is embedded in a ceramic matrix support having a first side and an opposing second side, and a hermetically sealed via extends from the split-ring conductor to the second side to connect to an electrical supply. A ground plane is formed on the second side, and plasma is configured to be generated proximate to the first side. The support is configured to seal to a wall of a chamber so that the first side is exposed to one or more gases inside the chamber while the second side is isolated from the plasma and the one or more gases inside the chamber.
A gas sensor is provided in which an optical element extends through the ceramic matrix between the first side and the second side to collect light emitted by the plasma proximate to the first side. The split-ring conductor is surrounded by the ceramic matrix and is configured to generate a plasma proximate to the first side, while an electrical connector electrically connects to the split-ring conductor. The optical element is hermetically sealed to the ceramic matrix using one of a braze seal or a compression seal.
A manufacturing approach is described for producing the plasma generation device by forming a support from a ceramic matrix in a green state, embedding a split-ring conductor and a hermetically sealed via that extends from the split-ring conductor to the second side, and firing the ceramic matrix with the embedded split-ring conductor. A ground plane is positioned proximate to the second side before or after the firing. The first side is polished to achieve a desired thickness of ceramic matrix between the first side and the split-ring conductor, wherein the desired thickness corresponds to a desired resonance frequency.
Claims Coverage
The provided claims content covers six independent claim bases, directed to a ceramic-matrix split-ring plasma generation device, a gas sensor with hermetically sealed optical collection, manufacturing methods for hermetically sealed split-ring resonator structures and resonance control, and gas sensing system configurations including temperature sensing and flow-through geometry.
Hermetically isolated split-ring plasma generation device with embedded via and chamber wall seal
A plasma generation device with a support comprising a ceramic matrix, a split-ring conductor embedded in the ceramic matrix, a hermetically sealed via extending from the split-ring conductor to a second side configured to connect to an electrical supply, and a ground plane formed on the second side; plasma generated proximate to the first side; and the support sealing to a wall of the chamber such that the first side is exposed to one or more gases inside the chamber while the second side is isolated from the plasma and the one or more gases inside the chamber.
Gas sensor with hermetically sealed optical element for collecting plasma light
A gas sensor comprising a plasma generating device with a first side and an opposing second side, including a split-ring conductor surrounded by a ceramic matrix configured to generate plasma proximate to the first side, an optical element extending through the ceramic matrix between the first side and the second side configured to collect light emitted by the plasma, and a connector electrically connected to the split-ring conductor; wherein the optical element is hermetically sealed to the ceramic matrix using one of a braze seal or a compression seal.
Ceramic-matrix device manufacturing by embedding split-ring and setting resonance by polished thickness
A method of manufacturing a plasma generating device by forming a support from a ceramic matrix in a green state with first and second sides; embedding a split-ring conductor and a hermetically sealed via in the ceramic matrix during support forming, with the hermetically sealed via extending from the split-ring conductor to the second side; firing the ceramic matrix with the embedded split-ring conductor; positioning a ground plane proximate to the second side before or after the firing; and polishing the first side to achieve a desired thickness of ceramic matrix between the first side and the split-ring conductor, wherein the desired thickness corresponds to a desired resonance frequency.
Stacked ceramic tape fabrication of a hermetically sealed split-ring resonator antenna structure
A method of manufacturing a split-ring resonator plasma generation device by providing a plurality of ceramic tapes; creating at least one pattern of metallization on at least one of the plurality of ceramic tapes, wherein the metallization pattern comprises a split-ring resonator; stacking the plurality of ceramic tapes; firing the stack to produce a hermetically sealed antenna structure comprising a split-ring conductor in a ceramic matrix; and polishing the hermetically sealed antenna structure in an area over the split-ring conductor.
Gas sensing system using temperature sensor to account for plasma generation device temperature
A gas sensing system comprising a plasma generation device including a split-ring resonator microstrip with a split-ring conductor and a ceramic matrix configured to surround and support the split-ring conductor; and a temperature sensor in thermal communication with the plasma generation device to determine the temperature of the plasma generation device, wherein the temperature of the plasma generation device is taken into account during operation of the gas sensing system.
Flow-through two-connection gas sensing system with parallel optical window and sub-10 mm features
A gas sensing system comprising a plasma generation device including a split-ring resonator microstrip with a split-ring conductor embedded within a ceramic matrix configured to support the split-ring resonator microstrip; and a two-connection flow through gas cell defining a gas passage through a plasma chamber, where the gas cell comprises an optical window positioned substantially across the plasma chamber from and parallel to the ceramic matrix of the plasma generation device; wherein the gas cell provides gas flow in a direction substantially parallel to a plane of the plasma generation device and a plane of the optical window, and wherein the gas passage and the plasma chamber comprise features smaller than about 10 mm along a direction substantially normal to the direction of gas flow.
The inventive coverage centers on a ceramic-matrix split-ring plasma generation device using hermetically sealed via connections and a ground plane with plasma proximate to a chamber-exposed first side, a gas sensor that collects plasma light using an optical element extending through the ceramic matrix and hermetically sealed with a braze or compression seal, manufacturing methods that embed the split-ring conductor and hermetic via and set resonance via ceramic thickness controlled by polishing, and system-level configurations including temperature sensing and a flow-through gas cell geometry with an optical window parallel to the device plane and sub-10 mm feature constraints.
Stated Advantages
Not explicitly described in patent.
Documented Applications
Not explicitly described in patent.
Interested in licensing this patent?