Combined crystal retainer and contact system for deposition monitor sensors
Inventors
Assignees
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Publication Number
US-9506895-B2
Publication Date
2016-11-29
Expiration Date
Abstract
A combination retainer and electrical contact mechanism for a deposition monitor sensor includes a sensor body and a removable flexible electrical contact spanning between a fixed electrical (contact) element in the sensor's body and one face of an associated monitor crystal. A retainer insulates or insures electrical isolation of the spanning electrical contact from unwanted contact to electrically grounded components in which at least one of the retainer and crystal holder include features that maintain the electrical contact with the retainer in order to provide a single mechanism.
Core Innovation
The deposition monitor sensor includes a sensor body with a fixed electrical contact and a monitor crystal retained in an axial bore by a crystal holder. An electrical connection to the monitor crystal is formed by a removable flexible contact that spans between the fixed electrical contact element in the sensor body and one face of the retained monitor crystal, directly contacting both the fixed electrical contact element and the face.
The mechanism further includes a retainer configured to insulate or insure electrical isolation of the removable flexible electrical contact. The retainer and the flexible electrical contact include at least one feature for securably maintaining the removable flexible electrical contact while maintaining electrical isolation from grounded components and maintaining the contact orientation for all-orientation crystal retention.
Multiple retainer and contact embodiments are described, including a coiled conductive spring flexible contact retained in an insulating retainer groove, and a retainer with a circumferential split gap that compresses radially to engage an inner wall of the crystal holder bore. Alternate retention structures include retainer ears engaging receiving slots for twist-in retention, and a tubular conductive body with leaf springs that includes a vent hole to avoid virtual leaking/contamination.
Claims Coverage
The document provides two independent claims (a combination retainer and electrical contact mechanism, and a method), focusing on five main inventive features.
Removable flexible spanning electrical contact directly contacts sensor-body fixed contact and crystal face
A removable flexible contact spanning between the fixed electrical contact element in the sensor body and one face of the retained monitor crystal such that the removable flexible contact directly contacts both the fixed electrical contact element and the face of the retained monitor crystal.
Retainer configured for electrical isolation and securable maintenance of the flexible contact
A retainer configured for insulating or insuring electrical isolation of the removable flexible electrical contact and in which at least one retainer and said flexible electrical contact includes at least one feature for securably maintaining said flexible removable electrical contact.
Crystal holder and retainer includes feature for maintaining spanning electrical contact in fixed orientation
At least one of said crystal holder and said retainer includes at least one feature for maintaining said spanning electrical contact in a fixed orientation.
Gravity independent retaining of monitor crystal
Means for substantially retaining the monitor crystal in a predetermined position within the crystal holder independent of orientation relative to a local gravity field.
Split-gap retainer enabling compression-based engagement of crystal holder bore
A retainer having a circumferential split gap over its circumference enabling it to reduce its effective diameter when compressed, and to engage an inner wall defining the bore of the crystal holder when compression is released.
Across the independent claims, the core coverage requires a deposition monitor sensor arrangement where a removable flexible spanning electrical contact directly bridges a sensor-body fixed electrical contact and a face of a retained monitor crystal, while a retainer provides electrical isolation and securable maintenance. The claims further require fixed-orientation maintenance of the spanning electrical contact and include gravity-independent crystal retention, with structural retention features such as a circumferential split gap enabling compression-based engagement.
Stated Advantages
Reducing electrical contacts/junctions by using fewer resistive interfaces.
Simplifying in-situ replacement without tools/soldering.
Improving all-orientation crystal retention.
Protecting against crystal damage during cleaning/replacement.
Avoiding virtual leaking/contamination via a vent hole in the tubular conductive body.
Documented Applications
Deposition monitor sensor for a deposition control monitor, including excitation and detection circuitry for monitoring deposition.
In-situ crystal cleaning/replacement in a deposition monitor sensor (described in the context of protecting against crystal damage during cleaning/replacement).
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