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Publication Number
US-12347667-B2
Publication Date
2025-07-01
Expiration Date
Abstract
A method for automatically calibrating a sensor for a residual gas analyzer includes measuring a known sample by the sensor and obtaining data measurements at a first mass unit. A peak model function is fitted to the data to determine an existence of a peak. The peak model function is aligned to the data using dynamic time warping to determine peak features. It is determined whether a position of a peak center and a peak width are within a predetermined tolerance and, if so, the previous steps are performed for a next mass unit. If the position peak center or the peak width at the first mass unit are outside the predetermined tolerance, a sensor parameter is adjusted and another iteration of the calibration is performed. A signal is issued after a maximum number of iterations has been performed and the peak center and width are outside the predetermined tolerance.
Core Innovation
The invention provides an automated method for calibrating a sensor for a residual gas analyzer. The method measures a standard sample with the sensor and obtains data measurements corresponding to the measured standard at a first mass unit, fits a peak model function to the measured data, and determines the existence of a peak in the data via the peak model function.
The fitted peak model function is aligned to the data using dynamic time warping, and one or more peak features are determined within the data measurements via the dynamic time warping. The method determines whether a position of a peak center and a peak width are within predetermined peak tolerance and peak width tolerance ranges, and repeats the fitting, peak existence determination, alignment, and feature determination for a next mass unit when the peak center and peak width are within the predetermined tolerance ranges.
If the peak center position or the peak width are outside the predetermined tolerance ranges, the method adjusts at least one sensor parameter and repeats until the predetermined tolerances are met or a maximum number of iterations is performed. When the maximum number of iterations has been performed and the peak center position and the peak width for the first mass unit are not within the predetermined tolerance ranges, the method issues a signal indicating that technician intervention is required and stops calibration.
A further workflow selects a mass unit from a predefined slate of mass units and determines a base tune for the mass unit using historical parameter data from previous tunings. For each selected mass unit, the method performs peak width tuning iteratively until the peak width is within a predetermined tolerance and then performs mass accuracy tuning iteratively until the mass accuracy is within a predetermined tolerance, each with a maximum number of iterations assigned.
Claims Coverage
Two independent claims are identified. The first focuses on peak-model alignment with dynamic time warping and iterative sensor parameter adjustment based on peak center position and peak width tolerances, with technician-intervention signaling upon failure to meet tolerances within a maximum number of iterations. The second focuses on selecting a mass unit, determining a base tune using historical parameter data, performing separate iterative peak width tuning and mass accuracy tuning with iteration caps, and issuing a warning and stopping calibration when iteration limits are reached before tolerances are met.
Peak model alignment with dynamic time warping across mass units
Fitting a peak model function to measured sensor data for a mass unit, determining existence of a peak via the peak model function, aligning the peak model function to the data using dynamic time warping, and determining one or more peak features within the data measurements via the dynamic time warping.
Peak-center and peak-width tolerance decision driving iteration
Determining whether a position of a peak center and a peak width are within a predetermined peak tolerance and peak width tolerance range and repeating for a next mass unit if the position of the peak center and the peak width for the current mass unit are within the predetermined tolerance ranges.
Iterative sensor parameter adjustment with technician-intervention signal
Adjusting at least one sensor parameter when the position of the peak center or the peak width are outside the predetermined tolerance; repeating until the predetermined tolerances are met or a maximum number of iterations are performed; and issuing a signal indicating technician intervention is required after the maximum number of iterations has been performed without meeting the predetermined tolerance ranges.
Historical base tune with predefined slate and separate tuning loops
Selecting a mass unit from a predefined slate of mass units; determining a base tune for the mass unit using historical parameter data from one or more previous tunings; performing peak width tuning until the peak width is within a predetermined tolerance with a maximum number of iterations assigned; performing mass accuracy tuning until the mass accuracy is within a predetermined tolerance with a maximum number of iterations assigned; and moving to a next mass unit and repeating.
Warning-triggered stoppage when iteration limits are reached
Issuing a warning signal when at least one maximum number of iterations is reached before the corresponding tolerance is met, wherein the warning signal results in stoppage of the sensor calibration.
Across the independent claims, the inventive subject matter is centered on peak-model-based analysis with alignment using dynamic time warping and extraction of peak center and peak width features, followed by tolerance checks that drive iterative sensor parameter adjustment with technician-intervention signaling, and on a calibration workflow that uses historical parameter data to determine a base tune and performs separate iterative peak width and mass accuracy tuning for each mass unit on a predefined slate, with warning-triggered stoppage when iteration limits are reached.
Stated Advantages
Provides technician intervention required signaling when calibration cannot meet predetermined peak-center and peak-width tolerances within the maximum number of iterations.
Provides warning-signal stoppage of sensor calibration when peak width or mass accuracy tuning reaches assigned maximum iteration limits before meeting predetermined tolerances.
Documented Applications
Automatically calibrating a sensor for a residual gas analyzer by calibrating across mass units using peak-model processing and iterative tuning with stopping behavior based on tolerance and iteration limits.
Automatically calibrating a sensor for a residual gas analyzer using a base tune determined from historical parameter data, iteratively tuning peak width and mass accuracy across a predefined slate of mass units, and stopping calibration based on warning-signal iteration-limit conditions.
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