Zyvex


A research and development company focused on atomically precise manufacturing (APM). The organization develops tools, processes and workflows for atomic-scale patterning and device fabrication — including scanning-tunneling-microscope (STM) based lithography, MEMS-enabled parallel STM approaches, mask generation via thin-film and imprint workflows, and related measurement and automation techniques — and translates parts of this work into spin-off commercialization efforts in diagnostics and implantable microsystems.

Industries

Advanced Materials
Biotechnology
Developer Platform
Electronics
Information Technology
Manufacturing
Electronics Manufacturing
Nanotechnology Research

Nr. of Employees

medium (51-250)


Products

STM control system for automated atomic-precision lithography

A control system that converts commercial STM platforms into automated lithography tools for high-resolution, automated STM patterning and lithography workflows.

Real-time tip position correction controller

A controller that conditions piezo signals to correct creep and hysteresis in real time, reducing settling times and improving positional stability during STM operations.

Precision STM tip etching tool

Equipment and processes for producing reproducible, sharp STM tips to support reliable atomic-scale lithography.

Zyvex S200 Nanomanipulator

The Zyvex S200 is a manipulation and testing tool used inside a scanning electron microscope (SEM) or focused ion beam (FIB) system for micro- and nanoscale research and development applications.

NanoEffector

Nanoscale probes designed for Zyvex Nanomanipulator Systems with a tip radius better than 50 nm and high aspect ratio for high-density electrical characterization and micro- and nanoassembly.

NanoEffector TP-25 Tungsten Probes

Nanoscale tungsten probes designed for Zyvex nanomanipulator systems, offering a tip radius better than 50 nm and a high aspect ratio for high-density electrical probing.

View All Products

Services

R&D and prototype fabrication services for atomic-precision patterning and dopant-based nanoelectronic devices using STM-based methods.

Expertise Areas

  • Atomically-precise lithography
  • Quantum device fabrication with buried dopants
  • STM control systems and motion compensation
  • MEMS-enabled high-speed scanning
  • Show More (5)

Key Technologies

  • Scanning tunneling microscopy (STM) lithography
  • Hydrogen depassivation lithography (HDL)
  • MEMS z-actuators / on-chip STM components
  • Atomic layer deposition (ALD)
  • Show More (6)

News & Updates

Award to enable experimental exploration of nuclear physics using analog quantum simulator devices fabricated with atomic-precision patterning; collaborative project with NIST and UMD.

Multiple conference presentations (EIPBN, MNE, SPIE) describing atomically-precise mask writing, nanoimprint mask fabrication from STM patterns, and high-speed atomic-precision lithography.

Review article on fabrication processes for dopant-based 2D devices intended for quantum computing, published in MRS Bulletin (July 2021).

Publications describing a high-speed spectroscopy method and an on-chip MEMS z-actuator enabling high-speed atomic-resolution imaging.

Recognition of a collaborator for control developments supporting fabrication of quantum silicon devices at single-atom scale.

Awarded renewals and new research grants for projects including fabrication of bipolar devices, STM spectroscopy for counting buried dopants, and commercialization of MEMS STM technology.


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