Imprinted semiconductor multiplex detection array
Inventors
Savoy, Steve M. • John, Jeremy J. • Mitchell, Daniel R. • McAleer, Michael K.
Assignees
Publication Number
US-9768162-B2
Publication Date
2017-09-19
Expiration Date
2031-01-11
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Abstract
An array of sensor devices, each sensor including a set of semiconducting nanotraces having a width less than about 100 nm is provided. Method for fabricating the arrays is disclosed, providing a top-down approach for large arrays with multiple copies of the detection device in a single processing step. Nanodimensional sensing elements with precise dimensions and spacing to avoid the influence of electrodes are provided. The arrays may be used for multiplex detection of chemical and biomolecular species. The regular arrays may be combined with parallel synthesis of anchor probe libraries to provide a multiplex diagnostic device. Applications for gas phase sensing, chemical sensing and solution phase biomolecular sensing are disclosed.
Core Innovation
The invention provides an array of sensor devices, each comprising a set of semiconducting nanotraces with widths less than about 100 nm, fabricated using nanoimprint lithography. This top-down method allows for reproducible and controlled creation of nanodimensional sensing elements with precise dimensions and spacing, overcoming issues related to the influence of electrodes and limitations posed by traditional photolithography. These arrays are suitable for multiplex detection, enabling multiple copies of the detection device to be produced in a single processing step.
The sensors utilize the high surface-to-volume ratio of the nanotraces to achieve high sensitivity for detecting chemical and biomolecular species. Anchor probe molecules, such as nucleic acids or proteins, can be covalently coupled or synthesized onto the surfaces of the nanotraces, making each sensor device uniquely responsive to particular targets. Upon binding of complementary target molecules to the anchored probes, a measurable change in electrical conductance occurs, which can be monitored externally for each device in parallel.
This core innovation addresses the problem of cost-effectively and reproducibly fabricating large arrays of nano-scale features on a single wafer for use in sensors that rely on the detection of changes in electrical properties upon molecular binding. The invention provides a method for fabricating such arrays with precise control over feature size and spacing, enabling their use in sensitive detection for gas phase, chemical, and solution phase biomolecular sensing.
Claims Coverage
The patent contains one independent claim defining the principal inventive features of the multiplex detection array device.
Multiplex detection array device with nanotraces and anchor probe molecules
The device comprises: - A substrate. - An array of sensor devices, each sensor device including a source electrode, a drain electrode, and a plurality of semiconducting nanotraces (each nanotrace having a width of 10 nm to 100 nm, inclusive) disposed between the electrodes. - Selected anchor probe molecules are coupled to the semiconducting nanotraces in each sensor device, such that the electrical conductance of each sensor device changes in response to binding of selected target molecules with the anchor probe molecules specific to each device.
The inventive features focus on sensor devices formed of nanoscale semiconducting traces between electrodes with specifically coupled anchor probe molecules, providing detection based on conductance change upon selective target binding.
Stated Advantages
Provides a cost-effective, time-efficient, and reproducible method for fabricating arrays of nano-scale features on a single wafer for multiplex detection of selected analytes.
Enables precise control over the dimensions and spacing of nanodimensional sensing elements, achieving high sensitivity while avoiding the influence of electrodes.
Allows for simultaneous and parallel fabrication of multiple sensor devices in a single processing step, improving scalability and efficiency.
Facilitates multiplex detection by combining regular arrays with parallel synthesis of anchor probe libraries, creating diagnostic devices responsive to different targets.
Documented Applications
Multiplex detection of chemical and biomolecular species, including through electrical detection of binding events on the sensor array.
Gas phase sensing for detection of toxic gases or mixtures of explosive vapors using surface-bound sensitization compounds on nanotraces.
Chemical sensing in solution or various environments, based on detection of electrical changes from analyte binding.
Solution phase biomolecular sensing, such as diagnostic tests for pathogens by identifying nucleic acid sequences or other biomolecules.
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