Interdigitated electrode configuration for ion filter
Inventors
Hart, Matthew • Koehl, Andrew H.
Assignees
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Publication Number
US-9588081-B2
Publication Date
2017-03-07
Expiration Date
Abstract
An ion filter and a method of manufacturing an ion filter. The method including providing a monolithic structure; selectively removing regions of the structure, to form a pair of electrodes defining at least one ion channel therebetween. The electrodes are preferably mechanically connected at one or more locations by a portion of the structure; wherein the connecting portion of the structure provides a higher electrical impedance than the filter would provide without such a mechanical connection, to thereby electrically separate the electrodes.
Core Innovation
The invention relates to an ion filter formed from a monolithic structure defining at least one ion channel, where the ion channel is formed to provide at least two separated interdigitated electrodes. The interdigitated electrodes are held in fixed positions relative to one another by at least one connecting portion that structurally bridges or connects the electrodes while maintaining their separation within the ion channel region. The connecting portion is structured to allow an electrical impedance in a target range to be established between the at least two electrodes, thereby partially or fully electrically separating the electrodes.
The disclosed approach enables the separation of the electrodes using the connecting portion impedance rather than requiring an insulating substrate as part of the electrode separation. The connecting portion is dimensioned and/or electrically modified so that it provides higher electrical impedance than the electrode region. In embodiments, the connecting portion and/or electrodes are modified by doping and/or local chemical modification, including oxidation and/or silicon nitride-type modification, to establish the impedance in the target range.
The manufacturing aspect includes providing a monolithic structure and selectively removing regions to form at least one ion channel that separates interdigitated electrodes, leaving the connecting portion to hold the electrodes in fixed positions. In alternative manufacturing embodiments, regions of the monolithic structure and/or substrate are selectively added and/or removed to form the ion channel. The connecting portion can be positioned in an edge region in relation to elongate finger electrodes, and embodiments may include bonding to at least one support structure including at least one electrically insulating layer.
Claims Coverage
The document contains three independent claims covering two methods of manufacturing an ion filter and an ion filter device itself. Each independent claim centers on interdigitated electrodes held in fixed positions by a connecting portion that establishes electrical impedance in a target range to partially or fully electrically separate the electrodes.
Manufacturing an ion filter using monolithic structure with connecting portion impedance
Providing a monolithic structure; selectively removing one or more regions to form at least one ion channel to form at least two separated interdigitated electrodes and at least one connecting portion that holds the interdigitated electrodes in fixed positions; wherein the connecting portion is structured to allow an electrical impedance in a target range to be established between the electrodes to thereby partially or fully electrically separate the electrodes.
Manufacturing an ion filter using added and/or removed regions with connecting portion impedance
Providing a monolithic structure and/or substrate; selectively adding and/or removing one or more regions to form at least one ion channel to form at least two interdigitated electrodes and at least one connecting portion that holds the interdigitated electrodes in fixed positions; wherein the connecting portion is structured to allow an electrical impedance in a target range to be established between the electrodes to thereby partially or fully electrically separate the electrodes.
Ion filter with monolithic ion channel and connecting portion establishing impedance
An ion filter comprising a monolithic structure defining at least one ion channel forming at least two separated interdigitated electrodes and at least one connecting portion holding the interdigitated electrodes in fixed positions relative to one another; wherein the connecting portion is structured to allow an electrical impedance in a target range to be established between the electrodes to thereby partially or fully electrically separate the electrodes.
Across the independent claims, the core coverage is the same: interdigitated electrodes separated within an ion channel and held in fixed relative positions by a connecting portion whose electrical impedance in a target range provides partial or full electrical separation of the electrodes. Dependent claims further refine how the impedance is established and how the electrodes and connecting portion are positioned and supported.
Stated Advantages
The connecting portion establishes electrical impedance in a target range to thereby partially or fully electrically separate the electrodes.
Electrically separates interdigitated electrodes without requiring an insulating substrate for electrode separation.
Documented Applications
An ion mobility spectrometer including an ioniser, an ion filter, and an ion detector.
A device for selectively transferring ionised species between two spaces, using an ion filter as described in the independent claims.
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