Imprinted semiconductor multiplex detection array
Inventors
Savoy, Steve M. • John, Jeremy J. • Mitchell, Daniel R. • McAleer, Michael K.
Assignees
Publication Number
US-8450131-B2
Publication Date
2013-05-28
Expiration Date
2031-01-11
Interested in licensing this patent?
MTEC can help explore whether this patent might be available for licensing for your application.
Abstract
An array of sensor devices, each sensor including a set of semiconducting nanotraces having a width less than about 100 nm is provided. Method for fabricating the arrays is disclosed, providing a top-down approach for large arrays with multiple copies of the detection device in a single processing step. Nanodimensional sensing elements with precise dimensions and spacing to avoid the influence of electrodes are provided. The arrays may be used for multiplex detection of chemical and biomolecular species. The regular arrays may be combined with parallel synthesis of anchor probe libraries to provide a multiplex diagnostic device. Applications for gas phase sensing, chemical sensing and solution phase biomolecular sensing are disclosed.
Core Innovation
The invention provides an array of sensor devices comprising sets of semiconducting nanotraces, each with a width less than about 100 nm, fabricated using nanoimprint lithography. This method allows for the large-scale, reproducible creation of multiple sensor devices with precise nanodimensional features in a single processing step. Each sensor device includes parallel nanotraces positioned between electrodes, and these nanotraces serve as the active sensing elements, designed with precise spacing to reduce the influence of electrodes on the sensing response.
The core problem addressed is the need for a cost-effective, time-efficient, and reproducible method for fabricating arrays of nanoscale features on a wafer to form sensor devices capable of multiplex detection of analytes. Prior techniques like photolithography are limited by resolution and cost, while methods relying on nanowires or nanotubes lack scalability and consistent feature control. The described method overcomes these challenges by leveraging nanoimprint lithography to enable controlled fabrication of semiconductor nanotraces used for direct electrical detection in multiplex sensor arrays.
These regular arrays of nanotraces can be functionalized with different anchor probe molecules, enabling multiplex electrical detection of chemical and biomolecular species. The arrays are compatible with parallel synthesis of anchor probe libraries, permitting the generation of multiplex diagnostic devices suitable for detecting various analytes, with changes in the electrical characteristics of individual nanotraces serving as the readout mechanism.
Claims Coverage
The patent claims two main independent inventive features, each focusing on fabrication methods for semiconductor nanotrace arrays and their use in multiplex detection devices.
Method of fabricating arrays of semiconductor nanotraces using nanoimprint lithography
A method for making an array of semiconductor nanotraces includes the following steps: 1. Supplying a substrate. 2. Forming a series of individually-addressable electrodes with bonding pads on the substrate using standard lithography. 3. Depositing a layer of semiconductor material. 4. Using nanoimprint lithography (NIL) and dry etching steps to define a set of parallel nanotraces of semiconductor material positioned between the electrodes. This process may further include detailed NIL steps such as applying a layer of organic material, applying drops of polymerizable material, using a template with nanodimension depressions to shape the polymerizable layer, exposing with ultraviolet radiation to polymerize, removing the template, etching, and removing the remaining materials to leave the nanotraces.
Method of fabricating a multiplex array detection device with functionalized semiconductor nanotraces
A method for making a multiplex array detection device that comprises: 1. Supplying a substrate. 2. Forming a series of individually-addressable electrodes with bonding pads using standard lithography. 3. Depositing a layer of semiconductor. 4. Using nanoimprint lithography and dry etching to form a set of parallel nanotraces of the semiconductor between the electrodes. 5. Synthesizing selected anchor probe molecules on the semiconductor nanotraces. 6. Packaging the array onto an electronics board. This method may also include synthesizing anchor probe molecules by enclosing the array in a microfluidic coverplate and using Photo-Generated Reagent (PGR) techniques.
The independent claims cover innovative fabrication methodologies for creating arrays of semiconductor nanotraces with precise geometry using NIL, and a process for integrating these arrays into multiplex detection devices with customized probe molecule functionalization.
Stated Advantages
Nanoimprint lithography enables reproducible fabrication of semiconducting active layers with necessary nanodimensional features for direct electrical detection in sensing applications.
The method provides a cost-effective, time-efficient, and scalable approach to produce large multiplexed sensor arrays with precise feature control in a single processing step.
Controlled fabrication of nanophase features allows for detection of multiple analytes simultaneously using arrays that provide homogeneous and reliable sensor responses.
Nanoimprint lithography overcomes photolithography limitations by allowing patterning at resolutions not constrained by light wavelength or lens systems.
Parallel synthesis of anchor probe libraries on the arrays enables multiplexed diagnostic devices for diverse chemical and biomolecular detection tasks.
Documented Applications
Multiplex detection of chemical and biomolecular species through electrical monitoring of binding events on functionalized nanotraces.
Gas phase sensing using sets of nanotraces responsive to adsorbed gases on semiconductor surfaces.
Chemical sensing and solution phase biomolecular sensing for diagnostic testing, including detection of nucleic acid sequences, proteins, and other target analytes.
Interested in licensing this patent?