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Publication Number
US-12394646-B2
Publication Date
2025-08-19
Expiration Date
Abstract
A sensor system includes a processing chamber and a sensor assembly disposed within the processing chamber. The sensor assembly includes a substrate and a plurality of sensors including at least one of pressure sensors or flow sensors disposed across a surface of the substrate. Each respective sensor is adapted to measure a respective pressure or a respective flow of an environment proximate the respective sensor. The sensor system further includes a processing device communicatively coupled to the sensor assembly. The processing device is adapted to receive at least one of the measured respective pressures or the measured respective flows and determine a pressure distribution or a flow distribution of the processing chamber.
Core Innovation
A sensor system is provided that includes a processing chamber and a sensor assembly disposed within the processing chamber. The sensor assembly includes a substrate and a plurality of first sensors disposed across a surface of the substrate, including at least one of pressure sensors or flow sensors, and each sensor measures a respective pressure or a respective flow of an environment proximate the respective sensor.
The sensor assembly further includes a controller disposed on the substrate that activates the plurality of first sensors responsive to a determination that one or more of a threshold pressure condition or a threshold temperature condition is met. A processing device is communicatively coupled to the sensor assembly and receives at least one of the measured respective pressures or the measured respective flows.
Based on the received measurements, the processing device determines a pressure distribution or a flow distribution of the processing chamber. The system is configured such that the processing device determines a property distribution of the processing chamber based on measured one or more respective properties of the environment proximate the sensors.
Claims Coverage
The independent claims cover a sensor system with a processing chamber, an in-chamber sensor assembly that measures environment proximate sensor pressures and/or flows or one or more environment properties, a controller that activates the sensors based on threshold pressure and/or threshold temperature conditions, and a processing device that determines pressure/flow or property distributions from the received measurements. The core inventive features are organized into two independent claims.
Threshold-activated in-chamber pressure and/or flow sensing with distribution determination
A processing chamber; a sensor assembly disposed within the processing chamber, including a substrate and a plurality of first sensors comprising at least one of pressure sensors or flow sensors disposed across a surface of the substrate, wherein each respective sensor is adapted to measure a respective pressure or a respective flow of an environment proximate the respective sensor; a controller disposed on the substrate, wherein the plurality of first sensors are activatable by the controller responsive to a determination that one or more of a threshold pressure condition or a threshold temperature condition is met; and a processing device communicatively coupled to the sensor assembly, adapted to receive at least one of the measured respective pressures or the measured respective flows and determine a pressure distribution or a flow distribution of the processing chamber.
Threshold-activated property sensing with property distribution determination
A processing chamber; a sensor assembly disposed within the processing chamber, including a substrate and a plurality of sensors disposed on the substrate, wherein each respective sensor is configured to measure one or more respective properties of an environment proximate the respective sensor; a controller disposed on the substrate, wherein the plurality of sensors are activatable responsive to a determination that one or more of a threshold pressure condition or a threshold temperature condition is met; and a processing device communicatively coupled to the sensor assembly, configured to determine a property distribution of the processing chamber based on the measured one or more respective properties.
Across both independent claims, the claim coverage centers on in-chamber sensors measuring environment proximate pressures and/or flows or one or more environment properties, a controller that activates the sensors when threshold pressure and/or threshold temperature conditions are met, and a processing device that determines a corresponding pressure/flow distribution or property distribution from the measured values.
Stated Advantages
Not explicitly described in patent.
Documented Applications
Not explicitly described in patent.
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