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Publication Number
US-12241947-B2
Publication Date
2025-03-04
Expiration Date
Abstract
Various embodiments comprise a laser bonded glass-silicon vapor cell for performing spectroscopy on particles like atoms or molecules. In some examples, the laser bonded glass-silicon vapor cell comprises a glass base, a glass top, a silicon piece, and a filling material. The silicon piece comprises at least one through hole. The lower surface of the silicon piece is hermetically bonded to the glass base. The upper surface of the silicon piece is laser bonded to the glass top. The filling material is positioned in a cavity formed by the through hole, the glass base, and the glass top. The filling material may comprise an alkali metal, a salt slush, or an inert gas. In some examples the cavity formed by the through hole, the glass base, and the glass top may comprise a vacuum encapsulation.
Core Innovation
The invention is directed to laser-bonded glass-silicon vapor cells for atom/molecule spectroscopy. A vapor cell includes a cell body with a through hole, a first transparent piece attached to the cell body, and a second transparent piece laser bonded to the cell body. The cell cavity is formed by the through hole, the first transparent piece, and the second transparent piece, and a filling material is positioned within the cavity for providing vapor.
The glass-silicon vapor cell includes a silicon piece with the through hole, a glass base hermetically bonded to the silicon piece, and a glass top laser bonded to the silicon piece. The hermetic bond and the laser bond define a sealed cavity containing a filling material selected from alkali metal, alkali salt such as alkali azide, or an inert gas, and the cavity may be vacuum encapsulated. The laser bonding is used to enclose the filling material.
The document characterizes the problem as degradation associated with high-temperature bonding approaches such as anodic bonding, where high-temperature-driven reactions and diffusion degrade the filling composition and pressure. By using laser bonded glass-silicon joining in combination with a hermetically bonded glass base, the invention enables a sealed vapor cell suitable for spectroscopy on atoms and molecules.
Claims Coverage
The document provides three independent claims, covering a vapor cell structure, a manufacturing method for the vapor cell, and an apparatus that includes the vapor cell with heating, laser emission, and photodetection. Across these independent claims, the core inventive features emphasize through-hole cavity definition, transparent piece attachment including laser bonding, placement of a filling material within the cavity, and an apparatus-level optical detection arrangement.
Vapor cell with through hole and laser-bonded transparent pieces
A vapor cell with a cell body comprising a through hole, a first transparent piece attached to the cell body, a second transparent piece laser bonded to the cell body, and a filling material positioned in a cavity formed by the through hole, the first transparent piece, and the second transparent piece.
Method of manufacturing with transparent piece attachment and laser bonding
Attaching a first transparent piece to a cell body comprising a through hole, depositing a filling material into the through hole of the cell body, and laser bonding a second transparent piece to the cell body to enclose the filling material.
Glass-silicon vapor cell apparatus with heater, laser, and photodetector
An apparatus including a glass-silicon vapor cell comprising a silicon piece with a through hole, a glass base hermetically bonded to the silicon piece, a glass top laser bonded to the silicon piece, and a filling material positioned in a cavity formed by the through hole, the glass base, and the glass top; a heater configured to heat the filling material; a laser configured to emit a beam through the glass-silicon vapor cell; and a photodetector configured to detect the beam after the beam has passed through the glass-silicon vapor cell.
The claim set covers the structural vapor cell definition, the corresponding manufacturing sequence, and an apparatus that uses the glass-silicon vapor cell with a heater, a laser beam through the cell, and a photodetector after the beam exits the cell.
Stated Advantages
Avoids high-temperature-driven reactions and diffusion that degrade the filling composition and pressure associated with anodic bonding.
Documented Applications
Integration into optically pumped magnetometer environments with lasers and photodetectors passing through the glass windows to probe alkali vapor.
Integration into magnetoencephalography environments with lasers and photodetectors passing through the glass windows to probe alkali vapor.
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