Implantable all diamond microelectrode and fabrication method
Inventors
Li, Wen • Guo, Yue • Schuelke, Thomas • Becker, Michael • RECHENBERG, Robert • RUSINEK, Cory
Assignees
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Publication Number
US-12237212-B2
Publication Date
2025-02-25
Expiration Date
Abstract
An electrode is provided. The electrode includes a contact pad composed of boron-doped polycrystalline diamond (BDD); a fiber core composed of BDD extending longitudinally from the contact pad from a first end that is in direct contact with the contact pad to an opposing second end; and a polycrystalline diamond (PCD) cladding that coats and hermetically seals the contact pad and the fiber core. A first portion of the contact pad and a second portion at or near the second end of the fiber core are not coated and hermetically scaled by the PCD cladding. A method of fabricating the electrode is also provided.
Core Innovation
An implantable electrode uses a contact pad comprising boron-doped polycrystalline diamond (BDD) and a fiber core comprising BDD that extends longitudinally from the contact pad to a distal end. A polycrystalline diamond (PCD) cladding coats and hermetically seals a first portion of the contact pad and a second portion of the fiber core, while a third portion of the contact pad and a fourth portion of the fiber core at the distal end are not coated and are not hermetically sealed by the PCD cladding.
The fiber core and the PCD cladding collectively define a longitudinal shank with a width and a height within recited ranges. BDD of the fourth portion is exposed at the distal end as pristine BDD and defines a sensing region, while BDD of the third portion is exposed at an outermost surface of the contact pad and defines an electrode lead region. A plane of the fourth portion is perpendicular to a plane of the third portion.
In a related neural electrode embodiment, the distal end of the fiber core having PCD cladding is configured to be inserted between neurons in a brain or within a single neuron in a brain. The electrode includes an individual electrode in which the PCD cladding hermetically seals the entire individual electrode except for at least a first portion of the contact pad and a single second portion at the distal end of the fiber core, and the exposed first and second BDD portions define an electrode lead region and a sensing region, respectively.
A fabrication method forms the electrode by depositing a first layer of PCD on a substrate and depositing a layer of boron-doped polycrystalline diamond (BDD) on the first layer of PCD. The first layer of PCD and the layer of BDD are formed into a pattern defining a contact pad and a longitudinal fiber core, and a second layer of PCD is deposited over the entire layer of BDD to coat and hermetically seal selected portions. The electrode is removed from the substrate with BDD exposed at the distal end as pristine BDD defining a sensing region and BDD exposed at the contact pad outermost surface defining an electrode lead region.
Claims Coverage
The document includes three independent claims covering an electrode structure for an implantable all-diamond neural microelectrode, a neural insertion-configured electrode with exposed sensing and lead regions, and a fabrication method that uses PCD/BDD sequential deposition with patterning and selective PCD encapsulation; together they define key exposed pristine BDD regions and hermetic sealing relationships, with additional scope defined by dependent claims for geometry and array/comb integration.
Hermetically sealed PCD cladding with exposed pristine BDD sensing and lead regions
A contact pad comprising boron-doped polycrystalline diamond (BDD), a fiber core comprising BDD extending longitudinally from the contact pad to an opposing distal end, and a polycrystalline diamond (PCD) cladding that coats and hermetically seals a first portion of the contact pad and a second portion of the fiber core while leaving a third portion of the contact pad and a fourth portion of the fiber core at the distal end not coated and not hermetically sealed, such that BDD of the fourth portion is pristine and defines a sensing region and BDD of the third portion is exposed and defines an electrode lead region.
Longitudinal shank dimensions and perpendicular plane relationship
The fiber core and the PCD cladding collectively define a longitudinal shank having a width of greater than or equal to about 0.3 µm and less than or equal to about 45 µm and a height of greater than or equal to about 0.45 µm to less than or equal to about 30 µm, wherein a plane of the fourth portion is perpendicular to a plane of the third portion.
Neural insertion-configured distal end with hermetic sealing except exposed sensing and lead regions
An individual electrode comprising a contact pad comprising boron-doped polycrystalline diamond (BDD), a fiber core comprising BDD extending longitudinally from the contact pad to an opposing distal end, and a polycrystalline diamond (PCD) cladding that coats and hermetically seals the entire individual electrode except for at least a first portion of the contact pad and a single second portion at the distal end of the fiber core, where the distal end of the fiber core having the PCD cladding is configured to be inserted between neurons in a brain or within a single neuron in a brain, such that BDD of the first portion is pristine and defines a sensing region and BDD of the single second portion is exposed and defines an electrode lead region.
PCD/BDD sequential deposition with patterning and selective second PCD encapsulation
A method comprising depositing a first layer of polycrystalline diamond (PCD) onto a substrate, depositing a layer of boron-doped polycrystalline diamond (BDD) on the first layer of PCD, forming the first layer of PCD and the layer of BDD into a pattern defining a contact pad and a second section extending longitudinally to define a fiber core, depositing a second layer of PCD over the entire layer of BDD to coat and hermetically seal a first portion of the contact pad and a second portion of the fiber core while leaving a third portion of the contact pad and a fourth portion of the fiber core not coated and not hermetically sealed, and removing the electrode from the substrate such that BDD of the fourth portion exposed at the distal end is pristine and defines a sensing region and BDD of the third portion exposed at an outermost surface of the contact pad defines an electrode lead region.
Across the independent claims, the inventive coverage centers on an electrode having a BDD contact pad and BDD fiber core, a PCD cladding that hermetically seals selected portions while leaving pristine exposed BDD regions that define a distal sensing region and a proximal electrode-lead region, and a fabrication approach using sequential PCD then BDD deposition followed by patterning and selective second PCD encapsulation, with an insertion-oriented distal configuration in the neural embodiment.
Stated Advantages
Not explicitly described in patent.
Documented Applications
Not explicitly described in patent.
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