Method of manufacture for an ion mobility filter
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Publication Number
US-12031944-B2
Publication Date
2024-07-09
Expiration Date
Abstract
The present techniques relate to methods of manufacturing MEMS gas sensors, for example, an ion mobility filter which may be used as a field asymmetric ion mobility spectrometry filter. The method comprises a step of providing a support with an aperture (S300, S302) and forming electrical connections (S304) in the support. The method also comprises steps of attaching an electrode layer to the support (S306) so that the electrode layer covers the aperture and forming a plurality of ion mobility electrodes (S308) by mechanically dicing through the electrode layer. Each adjacent pair of electrodes defines an ion channel between them and each electrode is separate from the adjacent electrode(s).
Core Innovation
The invention relates to manufacturing an ion mobility filter using MEMS fabrication. A support comprising an aperture is provided, and an electrode layer is attached to the support such that the electrode layer covers the aperture. After attaching the electrode layer, a plurality of generally parallel individual ion mobility electrodes and a plurality of parallel ion channels are formed by mechanically dicing a plurality of parallel channels through the electrode layer.
Adjacent electrodes are separated from each other, and each adjacent pair of electrodes defines an ion channel between them. Each electrode spans the aperture, with opposed ends of each ion mobility electrode attached to the support. The mechanical dicing through the electrode layer is emphasized as avoiding tapered channels and enabling ion channels having high aspect ratio and channel geometry suitable for ion mobility filtering.
The disclosed filter architecture is used in an ion mobility spectrometry context. Independently controllable electrode potentials are used to generate different electric fields in different ion channels, and ions are transmitted, filtered, and detected as a filtered output based on the different electric fields created in corresponding ion channels.
Claims Coverage
The partial content includes two independent claims: an ion mobility filter manufacturing method and an ion mobility filter structure. Across these independent claims, the coverage centers on a support with an aperture, an electrode layer spanning the aperture, formation of parallel ion mobility electrodes and ion channels between adjacent electrodes, and attachment of each electrode’s opposed ends to the support.
Mechanically dicing parallel channels through an electrode layer over an aperture
A method comprising providing a support comprising an aperture; attaching an electrode layer to the support so that the electrode layer covers the aperture; and, after attaching the electrode layer to the support, forming a plurality of generally parallel individual ion mobility electrodes and a plurality of parallel ion channels by mechanically dicing a plurality of parallel channels through the electrode layer.
Adjacent electrode pairs define ion channels and electrodes are separate and attached at opposed ends
Each adjacent pair of electrodes defines an ion channel between them; each electrode is separate from adjacent electrodes; each electrode spans the aperture; and opposed ends of each ion mobility electrode are attached to the support.
Ion mobility filter with support aperture and electrode layer forming parallel channels
An ion mobility filter comprising a support comprising an aperture; and an electrode layer comprising a plurality of generally parallel individual ion mobility electrodes and a plurality of parallel ion channels, with each adjacent pair of electrodes defining an ion channel therebetween and each electrode being separate from other electrodes in the plurality of ion mobility electrodes.
Each electrode spans the aperture and is attached at opposed ends to the support
Each ion mobility electrode spans the aperture and opposed ends of each ion mobility electrode are attached to the support.
The independent claims collectively require a MEMS-style support with an aperture and a separately formed electrode layer spanning the aperture, where adjacent electrodes are separated so that each adjacent pair defines an ion channel. The manufacturing claim specifically requires mechanically dicing parallel channels through the attached electrode layer to create the parallel electrodes and channels, while the filter claim requires the resulting structural arrangement with opposed-end attachment to the support.
Stated Advantages
Avoids tapered channels.
Enables high-aspect-ratio ion channels (aspect ratio ≥10:1).
Enables independently controlled electrode potentials to create different electric fields in different ion channels for tuned transmission/absorption and detection.
Enables mitigation of detector saturation by enabling fewer or more channels.
Documented Applications
Ion mobility spectrometry based on a FAIMS-like system concept using independently controlled electrode potentials to create different electric fields in different channels and detect filtered output ions.
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