Carbyne-based sensing device for high spatial resolution in DNA sequencing and biomolecule characterization and method of fabricating the same

Inventors

Tung, Steve • Ma, Bo • Seiwert, Ty

Assignees

University of Arkansas at Little Rock

Abstract

A method of fabricating a sensing device for DNA sequencing and biomolecule characterization including the steps of fabricating a microelectrode chip having a silicon substrate and a silicon nitride diaphragm, attaching a monolayer graphene sheet to the silicon nitride diaphragm, dicing a portion of the monolayer graphene sheet to form a graphene microribbon, converting the graphene microribbon to a graphene nanoribbon, and converting the graphene nanoribbon to a carbyne. A sensing device for DNA sequencing and biomolecule characterization is also disclosed. The sensing device includes a silicon substrate, a cavity in the silicon substrate covered by a silicon nitride layer, microelectrodes attached to the silicon nitride layer, graphene covering the microelectrodes, and carbyne attached to a portion of the silicon nitride layer covering said cavity.

Core Innovation

The invention relates to a carbyne-based sensing device for DNA sequencing and biomolecule characterization, using a microelectrode chip that includes a silicon substrate and a silicon nitride diaphragm. The device integrates Cr/Au microelectrodes and graphene on the silicon nitride, and graphene is converted from a graphene microribbon to a graphene nanoribbon and further converted to carbyne, providing the carbyne-based sensing element.

The problem addressed is enabling high spatial resolution DNA sequencing and biomolecule characterization using direct electrical sensing, including the potential for single-base accuracy while avoiding signal overlapping. The described approach uses carbyne and associated nanostructures in a nanofluidic/diaphragm sensing configuration to support high spatial resolution and electrical readout of biomolecule interactions.

The fabrication scheme forms a silicon nitride diaphragm on a silicon substrate with integrated Cr/Au microelectrodes, transfers a monolayer graphene sheet over the electrodes, dices the graphene into a microribbon, and converts it into a graphene nanoribbon using AFM nanolithography. The graphene nanoribbon is converted to carbyne via TEM electron irradiation, and experimental results are reported to support the feasibility of microribbon formation, nanoribbon cutting behavior, and carbyne formation.

Claims Coverage

The provided independent claims cover two aspects: a method of fabricating a carbyne-based sensing device for DNA sequencing and biomolecule characterization, and the resulting sensing device architecture with a carbyne element attached over a cavity region. Across the independent claims, the inventive features include the silicon substrate with silicon nitride diaphragm/cavity, microelectrodes, graphene, and sequential conversion to carbyne through microribbon and nanoribbon stages.

The claim coverage centers on a silicon substrate with a silicon nitride diaphragm/cavity, microelectrodes, a graphene layer, and conversion of graphene through microribbon and nanoribbon stages to carbyne for use in DNA sequencing and biomolecule characterization.

Stated Advantages

Documented Applications