Sealed fluid chamber with planarization for biomolecular sensors and related methods
Inventors
Assignees
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Publication Number
US-11796537-B2
Publication Date
2023-10-24
Expiration Date
Abstract
The techniques relate to methods and apparatus for sealed fluid chambers. The device includes a sensor chip comprising a set of sensor elements configured to sense an analyte, and the set of sensor elements comprise an associated set of electrodes extending along the surface of the substrate. The device includes a fluid chamber comprising an edge proximate to the surface of the substrate, the fluid chamber comprising an inner portion in fluid communication with the set of sensor elements, wherein at least one electrodes extends from the inner portion of the chamber across the edge of the chamber and outside of the fluid chamber. The device includes a sealing member between the edge of the fluid chamber and the surface of the substrate such that the sealing member is disposed over at least a portion of the electrode that extends across the edge of the fluid chamber.
Core Innovation
The invention relates to sealed fluid-chamber biomolecular/nanochannel sensors in which a sensor chip includes a set of sensor elements configured to sense an analyte and a corresponding set of electrodes extending along a surface of a substrate. A fluid chamber extends vertically from the substrate and includes an edge proximate to the surface of the substrate, with an inner portion in fluid communication with the sensor elements. At least one electrode extends from the inner portion across the edge of the chamber and outside of the fluid chamber, while remaining accessible for electrical contact.
A sealing member is provided between the edge of the fluid chamber and the surface of the substrate, and the sealing member is disposed over at least a portion of the electrode that extends across the edge of the fluid chamber. The described sealing approach is intended to maintain a leak-resistant or leak-proof seal at the chamber edge while enabling the electrode to span the edge between the inner portion of the chamber and an external portion. Sealing concepts include sealing members such as an o-ring and sealing layers including planarized sealing layers.
The disclosed architecture includes through silicon vias (TSVs) routed from a backside using dielectric spacers, together with planarization to smooth topography under the seal to support leak-resistant sealing at the chamber edge. The disclosure also includes multi-chip modules (MCMs) integrating multiple sensor chips with sealed shared or separate fluid chambers and leak-resistant sealing over interchip seams, and sensing based on applying electrical drive and processing electrical signals to determine analyte presence or concentration.
Claims Coverage
The partial content includes one independent claim (clm-00001). The independent claim defines four inventive features centered on a sensor chip, a vertically extending fluid chamber, an electrode routed across the chamber edge, and a sealing member that covers the electrode portion while sealing the chamber edge to the substrate.
Sensor chip with analyte-sensing elements and electrodes spanning the substrate surface
A sensor chip comprising a set of sensor elements at least partially disposed on a surface of a substrate, wherein each sensor element of the set of sensor elements is configured to sense an analyte, and the set of sensor elements comprise an associated set of electrodes extending along the surface of the substrate.
Vertically extending fluid chamber with an edge proximate to the substrate surface
A fluid chamber extending vertically from the substrate and having an outer hemispheric surface exposed to the environment, the fluid chamber comprising an edge proximate to the surface of the substrate, the fluid chamber comprising an inner portion in fluid communication with the set of sensor elements.
Electrode extending across the fluid chamber edge to outside the chamber
At least one electrode of the set of electrodes extends from the inner portion of the chamber across the edge of the chamber and outside of the fluid chamber.
Sealing member disposed over the electrode portion extending across the chamber edge
A sealing member between the edge of the fluid chamber and the surface of the substrate such that the sealing member is disposed over at least a portion of the electrode that extends across the edge of the fluid chamber.
The claim coverage centers on coordinating electrode routing from fluid communication through a vertically extending chamber edge with a sealing member that seals the chamber edge to the substrate while covering the electrode portion that extends across the chamber edge. Dependent claim refinements mentioned in the provided partial content include sensor type and structure, planarized sealing layers and/or o-rings, and additional fluidic architecture such as input/output channels connected to a reservoir.
Stated Advantages
Maintains a leak-resistant or leak-proof seal at the chamber edge while allowing electrical contacts to sensors.
Documented Applications
Sealed fluid-chamber biomolecular/nanochannel sensing for determining analyte presence or concentration by applying electrical drive and processing electrical signals.
Multi-chip modules (MCMs) integrating multiple sensor chips with sealed shared or separate fluid chambers, including leak-resistant sealing over interchip seams.
Optional multiple-fluid operation including sample and reference fluids and cleaning as described in the partial content summary.
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