Nanowire-based sensors with integrated fluid conductance measurement and related methods
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Publication Number
US-11692965-B2
Publication Date
2023-07-04
Expiration Date
Abstract
The techniques relate to methods and apparatus for conductance measurement. A device includes a fluid chamber, at least one sensor element configured to sense an analyte, wherein the at least one sensor element is in fluid communication with the fluid chamber, and a set of one or more electrodes in fluid communication with the fluid chamber for sensing a conductance of a fluid in the fluid chamber.
Core Innovation
The invention relates to nanowire/nanochannel biosensor systems that use conductance measurement of a fluid in a fluid chamber while sensing an analyte. A sensor element is configured to sense an analyte and is in fluid communication with the fluid chamber, and a set of one or more electrodes in fluid communication with the fluid chamber senses a conductance of the fluid in the fluid chamber.
The described approach reduces noise relative to two-point resistance/conductance measurement by using a four-point resistance/conductance measurement architecture. Separate current and voltage measurement electrodes and electrode connection pads are described, with current and voltage measurement functions decoupled, and ion-implanted metalized contact pads are described to form an ohmic contact for the electrodes in connection with the sensor system.
The invention also integrates fluid conductance measurement onto the same chip with the sensing elements. Fluid conductance measurement is described for a static fluid chamber and for flowing microfluidic channels using spatially spaced electrode sets, including interlocked fan-shaped electrode arrays, and optional field-adjustment electrodes are described to support electrophoresis while maintaining conductance measurement of the fluid.
Claims Coverage
The independent claim covers a biosensor device that combines an analyte-sensing element in a fluid chamber with an electrode set configured to sense conductance of the fluid. Across the dependent claims, the inventive features further specify electrode configurations, electrode implementations, and measurement electronics connected to selected electrodes, along with optional insulating barrier portions covering electrode areas exposed to the chamber fluid.
Fluid chamber with analyte sensor in fluid communication
A fluid chamber with at least one sensor element configured to sense an analyte, wherein the sensor element is in fluid communication with the fluid chamber.
Electrode set configured to sense fluid conductance
A set of one or more electrodes in fluid communication with the fluid chamber for sensing a conductance of a fluid in the fluid chamber.
Voltage source and measurement device connected to electrode pair
A voltage source electrically connected to the electrodes and a measurement device electrically connected to the electrodes.
Through silicon via electrode implementation
Each of two electrodes comprise through silicon vias such that each electrode extends through a substrate to a second side of the substrate opposite a first side.
Thin film four-electrode implementation
Each of four electrodes comprise a thin film.
Insulating barrier covering an electrode portion exposed to the fluid
The one or more electrodes comprise an insulating barrier covering a portion of the electrode(s) in fluid communication with the fluid chamber.
Claim coverage centers on a device that couples analyte sensing in a fluid chamber with electrode-based conductance sensing of the chamber fluid. Dependent claims narrow this to decoupled voltage sourcing and measurement connections, thin-film and through-silicon-via electrode realizations, and insulating barrier portions on electrode areas exposed to the fluid.
Stated Advantages
Reduces noise relative to two-point resistance/conductance measurement by using a four-point resistance/conductance measurement architecture.
Documented Applications
Fluid conductance measurement in a static fluid chamber.
Fluid conductance measurement in flowing microfluidic channels using spatially spaced electrode sets.
Conductance measurement in combination with electrophoresis using optional field adjustment electrodes.
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