Systems and devices for molecule sensing and method of manufacturing thereof
Inventors
Gyarfas, Brett • Lindsay, Stuart • Pang, Pei
Assignees
Publication Number
US-11137386-B2
Publication Date
2021-10-05
Expiration Date
2033-10-10
Interested in licensing this patent?
MTEC can help explore whether this patent might be available for licensing for your application.
Abstract
Embodiments of the disclosure are directed to a device for molecule sensing. In some embodiments, the device includes a first electrode separated from a second electrode by a dielectric layer. The first electrode comprises a large area electrode and the second electrode comprises a small area electrode. At least one opening (e.g., trench) cut or otherwise created into the dielectric layer exposes a tunnel junction therebetween whereby target molecules in solution can bind across the tunnel junction.
Core Innovation
The invention provides devices and systems for molecule sensing, particularly for detecting target molecules and, in some embodiments, single molecule detection. The core device includes a first (bottom) electrode and a second (top) electrode separated by a dielectric layer, with the first electrode having a larger area compared to the second, smaller electrode. At least one opening, such as a trench, is cut or created through the second electrode and the dielectric layer, exposing a tunnel junction where target molecules in solution can bind and be detected.
The invention addresses the problem of manufacturing molecule detection devices where drilling or creating a nanoscale opening through a sandwich of electrode and dielectric materials can cause damage to the metal electrodes, potentially resulting in electrical shorting or reduced device reliability. Prior methods required precise alignment or drilling directly through metal electrodes, which risked damaging the structure and complicated mass production.
By introducing a method of patterning the device so that the smaller second electrode is laid over the dielectric and then selectively etching or cutting trenches to expose the tunnel junction, the invention reduces the risk of damage during fabrication. The process can utilize methods such as reactive ion etching, focused beams of He or low-energy argon ions, and does not require critical alignment steps, thereby simplifying manufacturing, allowing easier mass production, and improving device yield. The resulting structure enables access to the tunnel junction for molecules, which can be detected by measuring tunneling currents, optionally enhanced by chemical functionalization of the electrodes.
Claims Coverage
There are three independent claims, each outlining a distinct inventive feature pertaining to the manufacturing and functional operation of a device for molecule detection.
Method for manufacturing a molecule-detecting device with trench exposing tunnel junction
A method comprising the following steps: 1. Depositing a first bottom electrode with a defined area onto a solid supporting layer. 2. Depositing a dielectric layer over the first electrode. 3. Depositing a second top electrode over the dielectric, where this second electrode has an area substantially less than the first electrode. 4. Cutting or etching at least one trench through at least the second electrode and the dielectric layer, exposing the first electrode at the bottom of the trench and exposing a tunnel junction between the first and second electrodes.
Method for manufacturing with passivating layer and opening adjacent trench
A method comprising: 1. Depositing a first bottom electrode and a dielectric layer, followed by depositing a second top electrode with a substantially smaller area. 2. Establishing at least one trench through at least the second electrode and dielectric to expose a tunnel junction. 3. Substantially covering the device with a first passivating layer. 4. Establishing an opening in the passivating layer adjacent the at least one trench.
Method for identifying target molecules using functionalized device and tunnel junction detection
A method including the following steps: - Providing a device comprising a first bottom electrode on a solid supporting layer, a dielectric layer substantially covering the first electrode, a second top electrode separated by the dielectric with a smaller surface area, and at least one trench cut or etched to expose the tunnel junction. - Functionalizing at least a portion of at least one electrode with first molecules configured for non-covalent bonding with target molecules. - Flowing a solution with target molecules past the electrodes. - Detecting the target molecules upon their formation of a non-covalent bond with the first molecules.
The inventive features cover the fabrication of molecule-sensing devices with non-destructive trench formation to access a tunnel junction, the addition of protective passivating layers with access ports, and the functional use of such devices for molecular detection through non-covalent binding and tunneling current measurement.
Stated Advantages
Minimizes damage caused by drilling or cutting nano-sized openings through metal electrodes during device manufacturing.
Enables device manufacturing without the need for critical alignment steps, making production easier and potentially more economical for mass production.
Facilitates creation of openings to expose the tunnel gap using methods that minimize damage to the tunnel junction.
Documented Applications
Detection of target molecules, including single molecule detection.
Sequential reading of the composition of a polymer, such as determining base sequence in DNA, amino acid sequence in proteins, or sugar sequence in polysaccharides by passing the molecule through a nano-sized opening adjacent to the electrodes.
Interested in licensing this patent?