Device having a array of sensors on a single chip
Inventors
Motayed, Abhishek • Aluri, Geetha • Davydov, Albert V. • Rao, Mulpuri V. • Oleshko, Vladimir P. • Bajpai, Ritu • Zaghloul, Mona E.
Assignees
George Washington University • George Mason University • University of Maryland College Park • United States Department of Commerce
Publication Number
US-10908138-B2
Publication Date
2021-02-02
Expiration Date
2033-04-12
Interested in licensing this patent?
MTEC can help explore whether this patent might be available for licensing for your application.
Abstract
A nanostructure sensing device comprises a semiconductor nanostructure having an outer surface, and at least one of metal or metal-oxide nanoparticle clusters functionalizing the outer surface of the nanostructure and forming a photoconductive nanostructure/nanocluster hybrid sensor enabling light-assisted sensing of a target analyte.
Core Innovation
The invention relates to sensor devices comprising a semiconductor nanostructure functionalized with metal and/or metal-oxide nanoparticles forming a hybrid sensor that enables light-assisted sensing of a target analyte. The devices operate at room temperature with the assistance of light, allowing detection of chemicals in various gases including air, nitrogen, and argon.
The problem being solved is the poor selectivity, high operating temperatures, slow response times, and limited reliability of conventional metal-oxide based thin film chemical sensors for detecting harmful gases such as industrial pollutants, poisonous gases, chemical fumes, and volatile organic compounds. Conventional sensors typically require high temperatures (above 100 °C), exhibit poor selectivity between chemical species, have long response and recovery times, and are not well adapted for sensing chemicals directly in air.
The invention overcomes these deficiencies by providing hybrid chemiresistive architectures consisting of highly nanoengineered wide-bandgap semiconductor backbones functionalized with multicomponent photocatalytic nanoclusters of metal-oxides and/or metals. These hybrid sensors enable highly selective and sensitive detection of target analytes at room temperature via photoassisted processes. The nanostructures have relatively inactive surfaces that are functionalized with analyte-specific active metal-oxide and/or metal nanoparticles, enabling excellent selectivity and fast, reliable sensing with low power consumption and long lifetime.
Claims Coverage
The patent includes two independent claims, each defining one or more particle gas sensors on a single chip with specific structural and functional features.
Multi-particle gas sensors with combined metal oxide and metal particle adsorption layers
The device comprises a chip with a first semiconductor layer on a substrate, etched semiconductor electrodes, and adsorption layers including deposits of combinations of metal oxide particles and metal particles on subsets of the electrodes. The adsorption layers selectively adsorb different types of gases and interfering compounds, enabling selective detection.
Gas sensors configured for multi-analyte detection within a single chip
The device includes multiple adsorption layers on different subsets of semiconductor electrodes, each designed to adsorb different gas types and interfering compounds via different combinations of metal oxide and metal particles. The sensors exhibit changes in current, voltage, or resistance upon gas detection and operate with carrier gases such as air, nitrogen or argon, with increased conductivity under UV illumination.
The claims cover semiconductor gas sensor devices with etched semiconductor electrodes on a chip, functionalized with multicomponent adsorption layers composed of metal oxide and metal particles selectively adsorbing target gases and interfering compounds, providing selective, light-assisted detection of one or more gases in various carrier gases.
Stated Advantages
Light-induced room-temperature sensing enables low power operation, longer lifetime, and fast response/recovery times.
Excellent selectivity towards selected compounds, including distinguishing specific aromatic compounds.
Wide sensing range, capable of detecting analyte concentrations from 50 parts per billion to 1%.
Reliable and repeatable operation under various environmental conditions.
Documented Applications
Environmental monitoring for detecting industrial pollutants, poisonous gases, and VOCs in air.
Explosive threat detection, including sensitive and selective detection of nitroaromatic explosives like TNT at low concentrations.
Industrial monitoring and control, such as gas leak detection and process control in oil refineries and manufacturing plants.
Law enforcement and safety applications, including breath analyzers and alcohol monitoring.
Defense and security applications for detection of harmful chemicals, explosives, and chemical warfare agents in public spaces and by soldiers.
Indoor air quality monitoring and on-demand ventilation control in residential and commercial buildings.
Personal safety devices, first-responder portable detectors, and wearable sensors for hazardous gas detection.
Interested in licensing this patent?