Method for manufacturing biochip having improved fluorescent signal sensing properties and biochip manufactured by the same
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Publication Number
US-10705021-B2
Publication Date
2020-07-07
Expiration Date
Abstract
Provided is a biochip having improved fluorescent signal sensing properties. A filter layer is provided between a bio-layer and a light sensor layer so as to remove noise generated by stray light during a bio-reaction process. Thereby, the sensitivity of the light sensor layer can be enhanced.
Core Innovation
The disclosed invention relates to a biochip having improved fluorescent signal sensing properties. The biochip includes a bio-layer embedded with light emitting devices and formed with a plurality of reaction regions in which a biochemical reaction between a reference sample and a target sample takes place, a filter layer under the bio-layer, and a light sensor layer under the filter layer to form a plurality of light sensing units.
In the biochip, the filter layer is formed by planarizing an upper portion of the light sensor layer and stacking nanoscale thin films through an atomic layer deposition (ALD) process. Light emitted from each of the light emitting devices is blocked from being incident on the corresponding light sensing unit, and the filter layer includes a color filter layer, an overcoating and passivation layer, a fluorescent-excitation-light band-reject-filter layer, and an insulation film layer formed by stacking nanoscale oxide or nitride thin films.
The light sensor layer further comprises an image signal processor configured for analyzing and processing a signal output from the bio-layer. Additional described embodiments include dam-shaped structures forming reaction regions, vertical alignment of light emitting devices over the sensing units, and temporal noise removal using processing that combines repeated pre/post-fluorescence signals and mean-before/mean-after subtraction to enhance sensitivity.
Claims Coverage
The document contains one independent claim. Across the independent claim and its dependent claims, the coverage centers on four inventive features: an ALD-stacked nanoscale filter layer structure, planarization of the light sensor layer before filter stacking, blocking of emitted light from corresponding light sensing units, and image signal processing for analyzing and processing signals output from the bio-layer with temporal-noise removal based on pre/post fluorescent signals.
Improved fluorescent signal sensing biochip architecture with embedded light emitting devices and reaction regions
A bio-layer embedded with light emitting devices, formed with a plurality of reaction regions each configured for a biochemical reaction between a reference sample and a target sample; a filter layer formed under the bio-layer; and a light sensor layer formed under the filter layer with a plurality of light sensing units.
ALD planarization and nanoscale filter stacking with light blocking between light emitting devices and light sensing units
The filter layer is formed by planarizing an upper portion of the light sensor layer and stacking nanoscale thin films through an atomic layer deposition (ALD) process, and light emitted from each light emitting device is blocked from being incident on the corresponding light sensing unit.
Stacked optical filter layers including band-reject and oxide/nitride insulation
The filter layer comprises a color filter layer formed over the planarized light sensor layer; an overcoating and passivation layer formed over the color filter layer; a fluorescent-excitation-light band-reject-filter layer formed over the overcoating and passivation layer; and an insulation film layer formed by stacking nanoscale oxide or nitride thin films over the fluorescent-excitation-light band-reject-filter layer.
Image signal processing configured for analyzing and processing bio-layer output
The light sensor layer further comprises an image signal processor configured for analyzing and processing a signal output from the bio-layer.
Overall, the claim coverage ties improved fluorescent sensing to a specific optical/filter-layer stack created by planarization plus ALD nanoscale thin-film deposition, with light emitted by the light emitting devices not incident on corresponding light sensing units, combined with image signal processing of the bio-layer output.
Stated Advantages
Improved fluorescent signal sensing properties.
Temporal noise removal to enhance sensitivity.
Documented Applications
Fluorescence-based real-time quantitative PCR.
Location-based multiplexed molecular diagnosis (bio-LOC/lab-on-chip), including a molecular diagnosis kit and a reader system/MCU.
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