Apparatus and method for programmable spatially selective nanoscale surface functionalization
Inventors
Saleh, Nedal • Khalid, Waqas • Saleh, Faisal
Assignees
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Publication Number
US-10497541-B2
Publication Date
2019-12-03
Expiration Date
Abstract
A spatially selective surface functionalization device configured to generate a pattern of micro plasmas and functionalize a substrate surface may include: a pattern management system, a patterning head, and a gas delivery system, wherein the gas delivery system provides a primed gas mixture for forming a plasma between the patterning head and a target substrate below the patterning head. A patterning head may generate a distribution of micro plasmas from individual directed beams of electrons with spatial separation. A pattern management system may store and manipulate information about a pattern of surface functionalization and generate instructions for regulating a distribution of micro plasmas that functionalize a substrate surface.
Core Innovation
The invention provides a method of modifying a surface with a plasma by energizing a first set of individually addressable electron emission structures in an electron source. The electron source includes a membrane having a first surface and a second surface, and electrons are accelerated from the first set towards the membrane to form micro plasmas where the accelerated electrons intersect a blend of gases.
A gas blend is created in a working volume adjacent to the second surface of the membrane, and the second surface is on an outer surface of the electron source. The method adjusts a distance between a substrate and the second surface so that the micro plasmas intersect a surface of the substrate at a first location, and can energize a second set of individually addressable electron emission structures to form a second set of micro plasmas intersecting the surface at a second location.
The invention enables dynamic spatial selectivity by controlling the distributions of intersection points of micro plasmas on the substrate. The first set and second set of micro plasmas have different distributions of intersection points, defined by different perimeters, while functionalization at the first distribution remains unchanged within an overlap area during forming the second set.
In additional variations, vacuuming forms a pressure differential across the membrane, and the electron emission structures can comprise pyroelectric electron (PE) emission structures with independently addressable thermal elements.
Claims Coverage
The document includes four independent claims. Across these independent claims, the inventive features focus on forming micro plasmas from individually addressable electron emission structures, controlling the location and distribution of micro-plasma intersection on a substrate surface, and preserving functionalization in overlap regions during distribution changeover; additional independent-claim scope includes vacuum-created pressure differential and pyroelectric electron (PE) emission structures.
Individually addressable electron emission micro-plasma formation
Energizing a set comprising individually addressable electron emission structures in an electron source, creating a blend of gases in a working volume adjacent to a membrane, accelerating electrons from the set towards the membrane, and forming a set of micro plasmas where the accelerated electrons intersect the blend of gases.
Substrate distance positioning for controlled micro-plasma intersection
Adjusting a distance between a substrate and the second surface of the membrane such that the micro plasmas intersect a surface of the substrate at a first location.
Different micro-plasma distributions with functionalization preserved in overlap
Energizing a first set and then energizing a second set of individually addressable electron emission structures to form first and second sets of micro plasmas having a first and second distribution of intersection points that are different, where functionalization at the first distribution remains unchanged within an overlap area while changing to form the second distribution.
Instruction-defined pattern portions forming different micro-plasma distributions at different positions
Forming a first distribution of micro plasmas at a first position on the surface according to a first instruction and forming a second distribution of micro plasmas at a second position according to a second instruction, where the instructions and the distributions and the positions are different and the second distribution corresponds to a second portion of a pattern different from a first portion.
Vacuum-created pressure differential across the membrane
Vacuuming to form a pressure differential across the membrane, where the working volume contains the gas mixture at a first pressure and an interior of the electron source has a second pressure smaller than the first pressure.
Pyroelectric electron (PE) emission structures for micro-plasma generation
The electron emission structures comprise pyroelectric electron (PE) emission structures.
Overall, the independent claims cover plasma surface modification using individually addressable electron emission structures to form micro plasmas, with intersection location and distribution controlled by membrane-adjacent gas blending and substrate-to-membrane distance. The claim set further includes switching between different micro-plasma distributions while keeping functionalization unchanged in overlap areas, instruction-based formation of different pattern portions at different positions, vacuum-created pressure differential across the membrane, and configurations where the electron emission structures are pyroelectric electron (PE) emission structures.
Stated Advantages
Dynamic spatial selectivity by controlling the distributions of intersection points of micro plasmas on the substrate.
Functionalization at the first distribution remains unchanged within an overlap area during forming the second set.
Documented Applications
No documented applications found
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