Microchip structure and treatments for electrochemical detection
Inventors
Jack, Graham D. • Hayman, Ryan B.
Assignees
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Publication Number
US-10416109-B2
Publication Date
2019-09-17
Expiration Date
Abstract
Disclosed herein are processes and devices for use in the electrochemical detection of a target in a sample. For example, silicon or glass surfaces are treated with silanes functionalized with various side chains to tune the surface wetting characteristics.
Core Innovation
The invention relates to a process for the manufacture of a biosensing device that uses a substrate having an electrically conductive lead. An insulating layer is applied to the substrate and the electrically conductive lead, where the insulating layer comprises one or more of silicon dioxide and silicon nitride, and an aperture is etched in the insulating layer to expose a portion of the electrically conductive lead onto which a nanostructured microelectrode is to be plated.
The process oxidizes the insulating material to form oxidized silicon dioxide or oxidized silicon nitride, and one or more of the oxidized silicon dioxide and the oxidized silicon nitride are allowed to react with a functionalized silane. A self-assembled monolayer of the functionalized silane is formed on the insulating layer.
In another version, the process includes etching a surface of the insulating layer and a surface of the electrically conductive lead to clean and/or oxidize the surfaces and capping the etched insulating-layer surface with a self-assembled monolayer of functionalized silane. The disclosed approach emphasizes oxygen plasma to clean/oxidize surfaces and forming a self-assembled monolayer from functionalized trichlorosilanes.
Claims Coverage
The partial content includes two independent claims. Each independent claim centers on a biosensing-device manufacturing process with insulating-layer patterning and functional-silane self-assembled monolayer formation over silicon dioxide and/or silicon nitride while addressing exposed lead regions for a nanostructured microelectrode.
Insulating layer on conductive lead for biosensing device manufacture
A substrate having an electrically conductive lead is provided, and an insulating layer is applied to the substrate and the electrically conductive lead, where the insulating layer comprises one or more of silicon dioxide and silicon nitride.
Aperture exposing conductive lead for nanostructured microelectrode
An aperture is etched in the insulating layer to expose a portion of the electrically conductive lead onto which a nanostructured microelectrode is to be plated.
Oxidizing insulating layer and forming functionalized silane self-assembled monolayer
One or more of the silicon dioxide and the silicon nitride are oxidized to form oxidized silicon dioxide or oxidized silicon nitride, and the oxidized silicon dioxide and/or oxidized silicon nitride are allowed to react with a functionalized silane to form a self-assembled monolayer of the functionalized silane on the insulating layer.
Cleaning/oxidizing etched surfaces and capping with functionalized silane self-assembled monolayer
A surface of the insulating layer and a surface of the electrically conductive lead are etched to clean and/or oxidize the surfaces, and the etched surface of the insulating layer is capped with a self-assembled monolayer of functionalized silane.
Overall, the independent claims cover forming an insulating stack of silicon dioxide and/or silicon nitride over an electrically conductive lead, patterning an aperture to expose the lead for a nanostructured microelectrode, and then creating a functionalized silane self-assembled monolayer by oxidizing and reacting oxidized insulating surfaces or by cleaning/oxidizing etched surfaces and capping.
Stated Advantages
Tuning and stabilizing hydrophobic wetting and improving consistency of droplet/probe deposition.
Reducing biomolecule adsorption/trapping and solution penetration.
Preventing undesired spreading/wicking that can cause downstream sensor fabrication issues.
Documented Applications
Biosensing device manufacture.
Electrically conductive biosensing electrodes, including working/counter/reference electrodes and multiplexed biosensing.
Microfluidic cartridge/systems with sample processing and electrocatalytic detection chambers.
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