Interdigitated electrode configuration for ion filter
Inventors
Hart, Matthew • Koehl, Andrew H.
Assignees
Interested in licensing this patent?
MTEC can help explore whether this patent might be available for licensing for your application.
Abstract
An ion filter and a method of manufacturing an ion filter. The method including providing a monolithic structure; selectively removing regions of the structure, to form a pair of electrodes defining at least one ion channel therebetween. The electrodes are preferably mechanically connected at one or more locations by a portion of the structure; wherein the connecting portion of the structure provides a higher electrical impedance than the filter would provide without such a mechanical connection, to thereby electrically separate the electrodes.
Core Innovation
An ion filter uses a monolithic structure that defines at least one ion channel forming opposing electrodes held in fixed positions relative to one another by at least one connecting portion. The connecting portion is structured to allow an electrical impedance to be established between the opposing electrodes so as to thereby partially or fully electrically separate the opposing electrodes. The opposing electrodes are interdigitated electrodes in the disclosed ion filter structure.
A manufacturing approach provides a monolithic structure and selectively removes one or more regions to form at least one ion channel. Selective removal forms opposing electrodes and a connecting portion that holds the opposing electrodes in fixed relative positions, including formation of at least two interdigitated electrodes. The connecting portion enables electrical impedance between the opposing electrodes to partially or fully electrically separate the opposing electrodes.
In the manufacturing approach that further includes bonding, the monolithic structure is bonded to at least one support structure that includes at least one electrically insulating layer. The electrical impedance is produced by removal of a portion of the monolithic structure after bonding to the at least one support structure. This sequence establishes the impedance between opposing electrodes while maintaining mechanical linkage of the electrodes at fixed positions.
Claims Coverage
The supplied independent claims include two method claims for manufacturing an ion filter and one device claim for an ion filter, each centered on forming interdigitated opposing electrodes within a monolithic structure using a connecting portion that establishes electrical impedance. Across the independent claims, there are three main inventive elements: monolithic structure with selectively formed ion channels and interdigitated electrodes, a connecting portion that holds opposing electrodes in fixed relative positions, and impedance-based electrical separation via the connecting portion.
Monolithic ion channel formation with fixed-position opposing electrodes
A monolithic structure is provided and one or more regions are selectively removed to form at least one ion channel, thereby forming opposing electrodes held in fixed positions relative to one another by at least one connecting portion.
Connecting portion enabling impedance-based electrical separation
The connecting portion is structured to allow an electrical impedance to be established between the opposing electrodes, thereby partially or fully electrically separating the opposing electrodes while holding them in fixed positions.
Interdigitated electrodes formed by selective removal
The selectively removing one or more regions to form the at least one ion channel forms at least two interdigitated electrodes.
Bonding to support with electrically insulating layer and impedance produced after bonding
The monolithic structure is bonded to at least one support structure that includes at least one electrically insulating layer, wherein the electrical impedance is produced by removal of a portion of the monolithic structure after bonding to the at least one support structure.
Ion filter with monolithic structure, ion channel, and impedance-separated interdigitated electrodes
An ion filter comprising a monolithic structure defining at least one ion channel forming at least two opposing electrodes and at least one connecting portion that holds the opposing electrodes in fixed positions relative to one another, where the connecting portion is structured to allow an electrical impedance to be established between the opposing electrodes to partially or fully electrically separate the opposing electrodes, and wherein the opposing electrodes are interdigitated electrodes.
Across the independent claims, the scope is directed to an ion filter and manufacturing methods that use a monolithic structure to form ion channels and interdigitated opposing electrodes, with a connecting portion that maintains fixed electrode positioning and establishes electrical impedance to partially or fully electrically separate the electrodes. In one independent method claim, bonding to a support structure with an electrically insulating layer is included, and the electrical impedance is produced by removing a portion of the monolithic structure after bonding.
Stated Advantages
Documented Applications
Ion mobility spectrometry using an ion mobility spectrometer.
Ion pump applications, including an ionizer and an ion detector.
Interested in licensing this patent?