Field asymmetric ion mobility spectrometry filter
Inventors
Toutoungi, Danielle • Hart, Matthew • Somerville, John • Pearson, Jon • Allsworth, Max • Orrell, Richard • Negri, Antoni • Spinks, Jeremy • Holden, Martin • Koehl, Andrew H. • Taylor, Alastair
Assignees
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Publication Number
US-10002750-B2
Publication Date
2018-06-19
Expiration Date
Abstract
Ion filter for FAIMS fabricated using the LIGA technique. The ion filter is manufactured using a metal layer to form the ion channels and an insulating support layer to hold the structure rigidly together after separation of the metal layer into two electrodes.
Core Innovation
The invention provides an ion filter that includes at least one metal electrode layer having a serpentine trench that defines a plurality of ion channels and extends through the at least one metal electrode layer to separate the at least one metal electrode layer into two halves. The serpentine trench divides the electrode layer into two or more electrodes while maintaining fixed channel structures through the electrode layer thickness.
At least one support layer is affixed adjacent to the two halves and is annular with a central aperture formed therein configured to permit gas to flow therethrough. The support layer is positioned on edges of the metal electrode layer so that at least part of the support layer overlies ends of the serpentine trench or at least part of the ion channel, maintaining the two halves or multiple electrodes in fixed relative positions to one another.
The disclosed fabrication uses separating structures to maintain fixed mechanical separation between the two halves during electrode formation and attachment to support structures, followed by removing the separating structures to provide electrical isolation between the halves. In the additional ion filter embodiment, the support layer is configured as an electronic circuit carrier including at least one capacitance in parallel with the metal electrode layer, where the capacitance is at least partially formed by one or more discrete capacitors.
Claims Coverage
The document includes three independent claims. Each claim focuses on an ion filter structure with a serpentine-trench metal electrode layer and an annular aperture support that fixes electrode spacing, a fabrication method that uses separating structures removed after attachment to electrically isolate halves, and an ion filter where the annular support acts as an electronic circuit carrier providing capacitance in parallel with the electrode layer formed using discrete capacitors.
Serpentine-trench ion-channel metal electrode layer into two halves
At least one metal electrode layer having a serpentine trench which defines a plurality of ion channels and which extends through the at least one metal electrode layer to separate the at least one metal electrode layer into two halves.
Annular support layer with central aperture for gas flow and fixed electrode spacing
At least one support layer affixed adjacent to the two halves of the at least one metal electrode layer, wherein the at least one support layer is annular with a central aperture formed therein configured to permit gas to flow therethrough; and wherein the at least one support layer is positioned on edges of the at least one metal electrode layer with at least part of the at least one support layer over ends of the serpentine trench to maintain the two halves in fixed relative positions to one another.
Fabrication with separating structures for fixed mechanical separation and later electrical isolation
Fabricating an array of support structures on a sheet; fabricating a plurality of electrode structures by forming a plurality of electrode layers each having a serpentine trench which defines a plurality of ion channels, wherein each serpentine trench extends proximal to edges of each corresponding electrode layer to separate the corresponding electrode layer into two halves joined by a pair of separating structures for maintaining a fixed mechanical separation between the two halves; attaching said fabricated plurality of electrode structures to said sheet having said fabricated array of support structures with each electrode structure being attached to a respective support structure; removing, after said attaching step, said pair of separating structures for each said electrode structure to provide electrical isolation between said two halves; and separating each electrode structure and its respective attached support structure to provide individual ion filter devices.
Support layer as electronic circuit carrier with parallel capacitance formed by discrete capacitors
An ion filter wherein the at least one support layer is configured as an electronic circuit carrier; the at least one support layer includes at least one capacitance in parallel with the at least one metal electrode layer; and wherein the at least one capacitance is at least partially formed by one or more discrete capacitors.
Across the independent claims, the core structural idea is a metal electrode layer with a serpentine trench that defines ion channels and splits the electrode into two halves, paired with an annular support layer having a central aperture to permit gas flow while holding the electrodes in fixed relative positions over the trench or channel regions. The fabrication claim adds the use of separating structures that are removed after attachment to electrically isolate the separated electrode halves. The second structural embodiment further specifies the support layer as an electronic circuit carrier that provides capacitance in parallel with the metal electrode layer using discrete capacitors.
Stated Advantages
Documented Applications
Not explicitly described in patent.
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