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Showing 1 Patents
X-ray diffraction (XRD) characterization methods for sigma=3 twin defects in cubic semiconductor (100) wafers
05-12-2017 • US-9835570-B2
PARK, YEONJOON • KIM, HYUN JUNG • SKUZA, JONATHAN R. • LEE, KUNIK • KING, GLEN C. • CHOI, SANG HYOUK
National Aeronautics and Space Administration NASA